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淄博真空泵廠(chǎng)有限公司

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ESDP干式螺桿真空泵

　吸入效率(提升15%)。　排氣效率改善(2級可變，連續可變頻率)。

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ESDP干式螺桿真空泵

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優(yōu)點(diǎn)特征

　　吸入效率(提升15%)。

　　排氣效率改善(2級可變，連續可變頻率)。

　　極限壓力：1*10-2Torr(托)。

　　排氣溫度降低50%。

　　電力消耗減少30%。

　　不使用油和水，不會(huì )造成油和水的污染。

　　低功耗、低噪音、低振動(dòng)，動(dòng)平衡好，沒(méi)有慣性力，可高速運行。

　　設計結構簡(jiǎn)單，易保養，維修費用低，沒(méi)有易損件，壽命長(cháng)。

　　適用范圍廣，具有高真空性能。

　　使用壽命長(cháng)，氣體接觸部位都具有聚四氟乙烯、鎳和哈氏合金涂層。

　　不采用機械密封，密封部件無(wú)污染，不會(huì )因污染而頻繁發(fā)生故障。

　　前后采用稀有潤滑方式，提高軸承耐用性。

標準配件

　　基座和防護罩

　　排氣消聲器及進(jìn)氣分離器

　　吸氣口

　　止回閥

　　真空計

可選配件

　　吸濾器

　　排氣冷凝器

　　吸入式氣液分離器

　　流量開(kāi)關(guān)及溫度開(kāi)關(guān)

ESDP干式螺桿泵的應用范圍

　　ESDP系列在半導體合成及液晶生產(chǎn)上的應用，主要有半導體等離子增強氣相沉淀(PECVD)和反映離子刻蝕(RIE)工藝，液晶生產(chǎn)蝕刻制程和生產(chǎn)TFT熒幕電漿(PLASMA)的CVD制程中。此工藝要求返流為0，以保護工件免受污染。

　　在石油化工中，主要是抽取可凝性氣體，或有毒氣體，或腐蝕性氣體，或含有微塵的氣體。

　　制藥行業(yè)，用于藥物的真空干燥，藥物中間體回收，回收氣體消毒劑，為人造器官提供清潔無(wú)菌條件等。

　　化工中用于真空蒸餾及溶劑萃取回收，例如萃取回收丙酮，多元醇等工藝

　　工業(yè)排氣;集中式真空處理系統

　　擠出機的混合工藝及板材的排氣工藝

　　混合樹(shù)脂脫腥工藝;在脂肪酸生產(chǎn)中用于消除水污染，及噴射器中的阻塞物

　　食品行業(yè)用于香料、香精濃縮，食品包裝等。

技術(shù)參數

型號	抽氣量	極限壓力	電機功率	轉速	進(jìn)氣	排氣	冷卻水量	噪聲	重量
型號	M³/h	Pa	KW	rpm	mm	mm	L/min	dB	Kg
ESDP320	260	1.33	7.5	2900	65	50	10	80	320
ESDP430	360	1.33	11	2900	65	50	12	80	380
ESDP650	540	1.33	15	2900	80	65	12	80	580
ESDP900	750	1.33	18.5	2900	100	65	20	80	680
ESDP1500	1400	1.33	37	2900	125	80	30	82	950

相關(guān)產(chǎn)品

羅茨螺桿真空泵機組

羅茨螺桿真空泵機組

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ZF系列真空發(fā)生裝置

ZF系列真空發(fā)生裝置

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